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Excimer laser mirror

Mirrors for high-output excimer lasers ideal for UV applications. They offer excellent thermal stability and achieve low wavefront distortion.

The ideal TECHSPEC excimer laser mirror for demanding UV applications is optimized for use with high-output excimer lasers. By adopting a precision UV-grade synthetic quartz substrate, it achieves excellent thermal stability and low wavefront distortion. Designed for an incident angle of 45°, it has minimal polarization dependence (the reflective characteristics are not affected by the polarization state of the incident light). Additionally, a mirror version for an incident angle of 0° can also be custom manufactured. Please contact us for more details. ■ High damage threshold up to 1.5 J/cm² ■ Low-loss dielectric coating ■ Designed for use with 193 nm and 248 nm lasers *You can download the catalog from Edmund Optics Japan, which includes this product, from the link below.

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